evaporation txheej: Los ntawm cua sov thiab evaporating ib yam khoom rau tso rau ntawm cov khoom nto, nws yog hu ua evaporation txheej.Txoj kev no yog thawj zaug los ntawm M. Faraday hauv 1857, thiab nws tau dhau los ua ib qho ntawm
feem ntau siv cov txheej txheem txheej txheem niaj hnub no.Cov qauv ntawm cov khoom siv evaporation txheej yog qhia hauv daim duab 1.
Cov khoom evaporated xws li cov hlau, cov khoom sib txuas, thiab lwm yam yog muab tso rau hauv ib lub crucible los yog dai rau ntawm ib tug kub hlau raws li qhov evaporation qhov chaw, thiab lub workpiece yuav tsum plated, xws li hlau, ceramic, yas thiab lwm yam substrates, yog muab tso rau pem hauv ntej ntawm lub workpiece. crucible.Tom qab lub kaw lus khiav tawm mus rau lub tshuab nqus tsev siab, lub crucible yog rhuab kom evaporate cov ntsiab lus.Cov atoms los yog molecules ntawm cov khoom evaporated yog tso rau ntawm qhov chaw ntawm lub substrate nyob rau hauv ib tug condensed yam.Lub thickness ntawm zaj duab xis tuaj yeem nyob ntawm ntau pua ntawm angstroms mus rau ob peb microns.Lub thickness ntawm zaj duab xis yog txiav txim los ntawm tus nqi evaporation thiab lub sij hawm ntawm evaporation qhov chaw (los yog tus nqi thauj khoom), thiab muaj feem xyuam rau qhov kev ncua deb ntawm qhov chaw thiab substrate.Rau thaj chaw loj txheej txheej, ib qho rotating substrate los yog ntau qhov chaw evaporation feem ntau yog siv los xyuas kom meej qhov sib xws ntawm zaj duab xis thickness.Qhov kev ncua deb ntawm evaporation qhov chaw mus rau lub substrate yuav tsum tsawg tshaj li qhov nruab nrab txoj kev dawb ntawm vapor molecules nyob rau hauv cov roj seem kom tiv thaiv kev sib tsoo ntawm vapor molecules nrog cov roj seem ntawm cov roj molecules los ntawm kev ua rau cov tshuaj lom neeg.Qhov nruab nrab kinetic zog ntawm vapor molecules yog hais txog 0.1 txog 0.2 electron volts.
Muaj peb hom evaporation qhov chaw.
①Resistance cua sov qhov chaw: Siv cov hlau refractory xws li tungsten thiab tantalum los ua lub nkoj foil lossis filament, thiab siv hluav taws xob tam sim no los ua kom sov cov khoom evaporated saum nws los yog hauv lub crucible (Daim duab 1 [Schematic daim duab ntawm evaporation txheej khoom] lub tshuab nqus tsev txheej) Resistance cua sov qhov chaw yog siv los evaporate cov ntaub ntawv xws li Cd, Pb, Ag, Al, Cu, Cr, Au, Ni;
②High-frequency induction cua sov qhov chaw: siv high-frequency induction tam sim no kom sov lub crucible thiab evaporation khoom;
③Electron beam cua sov qhov chaw: muaj feem xyuam rau cov ntaub ntawv uas muaj siab evaporation kub (tsis qis dua 2000 [618-1]), cov khoom yog vaporized los ntawm bombarding cov khoom nrog electron beams.
Piv nrog rau lwm txoj hauv kev nqus cov txheej txheem, evaporative txheej muaj qhov tso nyiaj ntau dua, thiab tuaj yeem coated nrog cov yeeb yaj kiab theem pib thiab tsis yog thermal decomposed compound films.
Yuav kom tso ib lub siab purity ib leeg siv lead ua zaj duab xis, molecular beam epitaxy tuaj yeem siv.Cov khoom siv molecular beam epitaxy rau kev loj hlob doped GaAlAs ib txheej siv lead ua yog qhia hauv daim duab 2 [Schematic daim duab ntawm molecular beam epitaxy tshuab nqus tsev txheej].Lub dav hlau rauv yog nruab nrog ib qho chaw molecular beam.Thaum nws yog rhuab mus rau ib tug tej yam kub nyob rau hauv ultra-high nqus, cov ntsiab lus nyob rau hauv lub cub tawg yog ejected mus rau lub substrate nyob rau hauv ib tug beam-zoo li molecular kwj.Lub substrate yog rhuab mus rau ib tug tej yam kub, lub molecules tso rau ntawm lub substrate yuav migrate, thiab cov muaju yog zus nyob rau hauv kev txiav txim ntawm lub substrate siv lead ua lattice.Molecular beam epitaxy tuaj yeem siv rau
tau ib lub siab purity compound ib leeg siv lead ua zaj duab xis nrog rau qhov yuav tsum tau stoichiometric piv.Zaj duab xis loj hlob qeeb Qhov ceev tuaj yeem tswj tau ntawm 1 ib txheej / sec.Los ntawm kev tswj cov baffle, ib leeg siv lead ua zaj duab xis nrog cov khoom tsim nyog thiab cov qauv tuaj yeem ua kom raug.Molecular beam epitaxy yog dav siv los tsim ntau yam khoom siv kho qhov muag thiab ntau yam superlattice qauv zaj duab xis.
Post lub sij hawm: Lub Xya hli ntuj-31-2021