WVCP6000 Dej Vapor Cryopump Cryogenic Refrigeration Systems
Product Description
Guangzhou Xieyi Automation Technology Co., Ltd., uas yog tsim nyob rau hauv 2011, yog lub cim high-tech enterprise nyob rau hauv South Tuam Tshoj uas koom nyob rau hauv kev tshawb fawb txoj kev loj hlob, ntau lawm, kev sib tham thiab kev pab cuam rau ultra-low kub dej vapor capture twj thiab lwm yam cov cuab yeej siv hluav taws xob ultra-low kub.
XIEYI WVCP Cryochillers yog kaw lub voj voog cryogenic tub yees uas muab 550 watts ~ 6,000 watts ntawm cua txias.Cov cryochillers no tuaj yeem siv los ntes cov dej vapor thiab lwm yam khoom siv los ntawm kev khov lawv mus rau qhov chaw txias xws li Meissner coil (cryocoil).WVCP cryochillers kuj tseem siv los ua kom txias cov khoom xws li electrostatic chucks siv hauv semiconductor wafer ua.
Technical Parameter
Qauv | WVCP6000-SH | WVCP6000-DH |
Qhov siab tshaj plaws ua kom txias (W) | 6000 | 6000 |
Txoj kev xav siab tshaj plaws siv ceev ntawm tubular txias ntxiab (L / S) | 5 88000 | 5 88000 |
Txoj kev xav siab tshaj plaws ntawm phaj txias ntxiab (L / S) | 882 000 ib | 882 000 ib |
Lub tshuab nqus tsev kawg (mbar) | 2 * 10-8 | 2 * 10-8 |
Defrost lub sij hawm ntawm qhov siab tshaj plaws txias ntxiab cheeb tsam (min) | <5 | <5 |
Adjustable ntau yam ntawm defrost kub (℃) | - 20-30 | - 20-30 |
Kev tswj siab hom | Digital sensor + Mechanical hloov | Digital sensor + Mechanical hloov |
Quick restore tshuav nyiaj li cas siab muaj nuj nqi (QRBP) | Yog lawm | Yog lawm |
Roj thaiv kev pov thawj muaj nuj nqi (OBP) | Yog lawm | Yog lawm |
4G Chaw taws teeb tswj | Yog lawm | Yog lawm |
Txias media zog | Pro-ib puag ncig | Pro-ib puag ncig |
Qhov siab tshaj qhov chaw ntawm tubular txias ntxiab (㎡) | 4 | 4 |
Qhov siab tshaj plaws saum npoo ntawm phaj txias ntxiab (㎡) | 6 | 6 |
Specification ntawm ib qho txias ntxiab (㎡) | φ16 hli * 80m | / |
Specification ntawm ob chav txias ntxiab (㎡) | / | 2 * φ16mm * 40m |
Gas interface | 12.7 tooj liab welded hlws ris (Standard) | 12.7 tooj liab welded hlws ris (Standard) |
ParkerCPI / VCR (yeem) | ParkerCPI / VCR (yeem) | |
Cov dej txias txias (L / Min ntawm 24 ℃) | 48 | 48 |
Dej txias tswb ntsuas kub (℃) | 38 | 38 |
Txias ntauwd | Yog lawm | Yog lawm |
Dej txias connector (L / S) | G1" | G1" |
Max load zog (kW) | 25.3 | 25.3 |
Compressor nominal zog (HP) | 20 | 20 |
Fais fab mov (50HZ) | 380-400V AC 3P (H) Lub zog hluav taws xob | 380-400V AC 3P (H) Lub zog hluav taws xob |
200-230V AC 3P (L) | 200-230V AC 3P (L) | |
Qhov Loj (MM) | 935 (L) * 873 (D) * 1809 (H) loj | 1235 (L) * 873 (D) * 1809 (H) loj |
Qhov hnyav (KG) | 655 | 655 |
Sau koj cov lus ntawm no thiab xa tuaj rau peb